Standard Dimensions and Tolerances for 150mm Diameter GaAs Wafers
Property
|
Dimension
|
Tolerance
|
Units
|
Diameter
|
150
|
+/- 0.5
|
mm
|
Thickness, Center Point
|
|
|
|
Option A
|
675
|
+/- 25
|
µm
|
Option B
|
550
|
+/- 25
|
µm
|
Notch Orientation
|
[010]
|
+/- 2
|
degrees
|
Notch Depth
|
1
|
+0.25/-0.0
|
mm
|
Standard Dimensions and Tolerances for 100mm Diameter GaAs Wafers
Property |
Dimension |
Tolerance |
Units |
Diameter |
100 |
+/- 0.5 |
mm |
Thickness, Center Point |
675 |
+/- 25 |
µm |
Primary Flat Lenght |
32.5 |
+/- 2 |
mm |
Secondary Flat Lenght |
18 |
+/- 2 |
mm
|
US/SEMI and E/J-Flat-Option available
Standard Dimensions and Tolerances for 200mm Diameter GaAs Wafers
Property |
Dimension |
Tolerance |
Units |
Diameter |
200 |
+/- 0.5 |
mm |
Thickness, Center Point |
625 |
+/- 25 |
µm |
Notch Orientation |
[010] |
+/- 2 |
degrees |
Notch Depth |
1 |
+0.25/-0.0 |
mm
|
Standard Dimensions and Tolerances for 3inch Diameter GaAs Wafers
Property |
Dimension |
Tolerance |
Units |
Diameter |
76.2 |
+/- 0.5 |
mm |
Thickness, Center Point |
625 |
+/- 25 |
µm |
Primary Flat Lenght |
22 |
+/- 2 |
mm |
Secondary Flat Lenght |
11 |
+/- 2 |
mm
|
US/SEMI and E/J-Flat-Option available